MEMS MICRO & NANO SYSTEMS

EngeniusMicro has the expertise to design, model, and develop micro-electromechanical systems (MEMS) and nano-scale devices and systems. Our engineers have experience working with a variety of fabrication processes and methodologies to reduce system SWaP. Our cross-functional team of engineers can perform all phases of sensor design from program planning to design and fabrication to performance testing and analysis. EngeniusMicro teams with partners in the National Nanotechnology Coordinated Infrastructure to rapidly and affordably advance microfabrication state-of-the-art.

MEMS SENSOR DEVELOPMENT
High-Shock Navigation-Grade Devices, Accelerometers, Gyros, and Optical Sensors

MICROFABRICATION PROCESSES
Specialty Etching, Specialty Coatings, and Microfabrication Process Development

CHIP-LEVEL SYSTEMS
Package Design, Packaging Operations, and Wire-bonding Terminations

HARSH ENVIRONMENT TOLERANCE
Corrosion Sensors, High-G / High-Shock, High Velocity

MEMS SYSTEM DEVELOPMENT
Device Layout, Electronics Design, Program Planning, Modelling and Simulation

INDUSTRY & INSTITUTION PARTNERSHIPS
NNCI, Georgia Tech Research Institute, Auburn University